haohan电子气体四氟化碳分析Porapak Q预分离柱5m*3mm

本标准规定了瓶装电子工业用气体—四氟化碳的技术要求、试验方法、检验规则及
标志、包装、运输、贮存和安全的要求。
本标准适用于氟和碳直接反应化合生成并经过纯化处理的四氟化碳产品。它主要用
于微电子工业中等离子体工艺等离子体刻蚀和化学气相，以及太阳能硅片生产工艺。
分子式：CF4
分子量：88.00（按2003年国际原子相对质量）。

浩瀚色谱（山东）应用技术开发有限公司，采用气相色谱法测定了电子工业用气体—四氟化碳中氢，氧氩，氮，一氧化碳，二氧化碳，六氟化硫等杂质，柱效高，分离好，结果满意。

 

名称：填充柱

固定相：多孔聚合物

规格：4m*3MM(内径）

型号：PQ/Porapak Q

粒度：60-80目
应用：电子工业用气体—四氟化碳

This standard specifies the technical requirements, test methods, inspection rules and

Requirements for marking, packaging, transportation, storage and safety.

This standard is applicable to carbon tetrachloride products that are produced by direct reaction and combination of fluorine and carbon and are purified. It mainly uses

In the microelectronics industry, plasma etching and chemical vapor phase, as well as solar wafer production process.

Molecular formula: CF4

Molecular weight: 88.00 (according to the international atomic relative mass in 2003).



Haohan Chromatography (Shandong) Applied Technology Development Co., Ltd. has used gas chromatography to determine impurities such as hydrogen, oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, sulfur hexafluoride in carbon tetrafluoride, a gas used in electronic industry. The column efficiency is high, the separation is good, and the results are satisfactory.