浩瀚13X分子筛柱应用之碳酰氟中氢，氧，氩，氮，一氧化碳测定3m*3.2mm

目前，在半导体和液晶制造领域，大多以全氟烃作为刻蚀气体和清洁气体，但是上 述气体通常具有较大的全球变暖潜能(GWP，Global Warming Potential)值，为了减少温室 效应，需要开发具有低GWP值的替代产品。

碳酰氟(C0F2)是一种具有较低GWP值的半导体用蚀刻气体，半导体用清洁气体，以 及有机合成中的氟化剂、重要中间体。

浩瀚色谱研制MS13X分子筛柱测定碳酰氟中微量杂质氢，氧，氩，氮，一氧化碳，柱效高，分离好，结果满意。

名称：填充柱
固定相：分子筛60-80目
型号：MS-13X
规格：3m*3.2mm
应用：电子级碳酰氟分析
 
At present, in the semiconductor and liquid crystal manufacturing fields, perfluorocarbons are mostly used as etching and cleaning gases. However, these gases usually have a large global warming potential (GWP) value. In order to reduce the greenhouse effect, it is necessary to develop alternative products with low GWP values.



Carbonyl fluoride (C0F2) is an etching gas with low GWP value for semiconductors, a clean gas for semiconductors, and a fluorinating agent and important intermediate in organic synthesis.



The MS13X molecular sieve column developed by Haohan chromatography was used to determine trace impurities such as hydrogen, oxygen, argon, nitrogen, and carbon monoxide in carbonyl fluoride. The column efficiency was high, the separation was good, and the results were satisfactory.



Name: Filled Column

Fixed phase: molecular sieve 60-80 mesh

Model: MS-13X

Specification: 3m * 3.2mm

Application: Electronic grade carbonyl fluoride analysis