多晶硅是太阳能光伏行业的基础材料，其主要生产工艺是改良西门子法(即三氯氢硅还原法，SiHCl3+H2 — Si+3HC1),该工艺使用的主要设备多晶硅还原炉就是钟罩式化学气相沉积炉。

在多晶硅的整个生产过程中，需要对多晶硅还原炉排出的尾气中的氯化氢气体的含量进行检测，从而监控多晶硅还原炉内的生产情况。

浩瀚色谱（山东）应用技术开发有限公司，依据T/CNIA 0016-2019，采用HH-1毛细管柱气相色谱法TCD检测器，测定多晶硅还原炉底部排出的尾气中的氯化氢气体，柱效高，分离好，结果满意。

名称：毛细管柱
固定液：二甲基聚硅氧烷
型号：HH-1
应用：T/CNIA 0016-2019多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的气相色谱测定
适用于：岛津GC-14C，GC-2010，GC-2014，GC-2018，GC-2030
 
Polycrystalline silicon is the basic material of the solar photovoltaic industry, and its main production process is the improved Siemens method (i.e. trichlorosilane reduction method, SiHCl3+H2 — Si+3HC1), The main equipment used in this process is the bell jar type chemical vapor deposition furnace for polycrystalline silicon reduction.
During the entire production process of polycrystalline silicon, it is necessary to detect the content of hydrogen chloride gas in the exhaust gas discharged from the polycrystalline silicon reduction furnace, in order to monitor the production situation inside the polycrystalline silicon reduction furnace.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd., based on T/CNIA 0016-2019, used HH-1 capillary column gas chromatography TCD detector to determine the hydrogen chloride gas in the tail gas discharged from the bottom of the polycrystalline silicon reduction furnace. The column efficiency is high, the separation is good, and the results are satisfactory.
Name: Capillary Column
Fixed Liquid: Dimethyl Polysiloxane
Model: HH-1
Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)
Applicable to: Shimadzu GC-14C, GC-2010，GC-2014，GC-2018，GC-2030