Agilent多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的测定填充柱OV-101+5A+13X

本标准规定了多晶硅用回收氢气中氯化氢、氮气、氧气、总碳含量的气相色谱测定方法。本标准适用于多晶硅用回收氢气的氯化氢、氮气、氧气、总碳含量的测定，测定范围为（0-10000）×10-6

1.名称：甲烷转化柱
填料：镍催化剂，0.2mm
规格：25cm*3mm
型号：HH-Ni  column
2.

名称：13X分子筛不锈钢填充柱

规格：40CM*2MM
*高使用温度：300°C
3.名称：5A分子筛不锈钢填充柱
规格：2m*3.175（1/8）
*高使用温度：300°C
编号：20241015005
4.

名称：毛细管柱

固定液：二甲基聚硅氧烷

规格：30m*0.53mm*1.5um

型号：HH-1
5.

名称：不锈钢填充柱

固定液：20%二甲基聚硅氧烷

担体：Chromosorb W AW DMCS80-100mesh

型号：OV-101

应用：T/CNIA 0016-2019多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的气相色谱测定

适用于安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE，磐诺，东西电子，北分瑞利，科创，天瑞，天美，福立

 

This standard specifies the gas chromatography method for determining the content of hydrogen chloride, nitrogen, oxygen, and total carbon in recycled hydrogen gas for polycrystalline silicon. This standard is applicable to the determination of hydrogen chloride, nitrogen, oxygen, and total carbon content in recycled hydrogen for polycrystalline silicon, with a measurement range of (0-10000) × 10-6
1. Name: Methane Conversion Column
Packing: Nickel catalyst, 0.2mm
Specification: 25cm * 3mm
Model: HH Ni column
two
Name: 13X Molecular Sieve Stainless Steel Filled Column
Specification: 40CM * 2MM
*High operating temperature: 300 ° C
3. Name: 5A Molecular Sieve Stainless Steel Filled Column
Specification: 2m * 3.175 (1/8)
*High operating temperature: 300 ° C
Number: 20241015005
four
Name: Capillary Column
Fixed Liquid: Dimethyl Polysiloxane
Specification: 30m * 0.53mm * 1.5um
Model: HH-1
five
Name: Stainless Steel Filled Column
Fixed liquid: 20% dimethyl polysiloxane
Carrier: Chromosorb W AW DMCS80-100 mesh
Model: OV-101
Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)
Suitable for Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE, Panno, Dongxi Electronics, Beifen Ruili, Kechuang, Tianrui, Tianmei, Fuli