hhaohan多晶硅用氢气中磷化氢含量测定 17.5%DC550填充柱应用安捷伦78903m*1/8

本标准规定了多晶硅用氢气中磷化氢含量的气相色谱测定方法。 本标准适用于多晶硅用氢气中磷化氢含量的测定，测定范围为0.02×10-9～1×10-5(v/v)。

名称：17.5%DC-550填充柱
规格：3m*1/8
*高使用温度：240°C
货号：20240926001
适用于：安捷伦6890,7890,78208860,8890
标准：T/CNIA 0060-2020 多晶硅用氢气中磷化氢含量的测定 气相色谱法
 

This standard specifies the gas chromatography method for determining the phosphine content in hydrogen gas used for polycrystalline silicon. This standard is applicable to the determination of phosphine content in hydrogen gas for polycrystalline silicon, with a measurement range of 0.02 × 10-9 to 1 × 10-5 (v/v).
Name: 17.5% DC-550 Filled Column
Specification: 3m * 1/8
Maximum operating temperature: 240 ° C
Article number: 20240926001
Applicable to: Agilent 68907890782088608890
Standard: T/CNIA 0060-2020 Determination of Phosphine Content in Hydrogen for Polycrystalline Silicon by Gas Chromatography