Agilent二甲基聚硅氧烷浓缩柱SE30应用安捷伦测多晶硅用氢气中磷化氢0.6m*Φ3mm

名称：浓缩柱
规格：0.6m*Φ3mm
*高使用温度：300°C
适用于：安捷伦6890,7820,7890,8860,8890
标准：T/CNIA 0060-2020 多晶硅用氢气中磷化氢含量的测定 气相色谱法

本标准规定了多晶硅用氢气中磷化氢含量的气相色谱测定方法。

 本标准适用于多晶硅用氢气中磷化氢含量的测定，测定范围为0.02×10-9～1×10-5(v/v)。


 电子级多晶硅是半导体工业和集成电路的重要原料,技术的进步对多晶硅产品质量也提出了日益严格的要求。多晶硅生产中循环氢气大量过量,痕量磷杂质若不加以去除,将对多晶硅产品质量产生严重的影响。电子级多晶硅生产过程中磷化氢含量极低,磷杂质问题成为电子级多晶硅行业发展的瓶颈。

浩瀚色谱（山东）应用技术开发有限公司，研制SE30浓缩柱配合DC550填充柱气相色谱法FPD检测器测定 多晶硅用氢气中磷化氢含量，结果满意。
 

Name: Concentration Column
Specification: 0.6m * Φ 3mm
*High operating temperature: 300 ° C
Applicable to: Agilent 689078207890886088890
Standard: T/CNIA 0060-2020 Determination of Phosphine Content in Hydrogen for Polycrystalline Silicon by Gas Chromatography
This standard specifies the gas chromatography method for determining the phosphine content in hydrogen gas used for polycrystalline silicon.
This standard is applicable to the determination of phosphine content in hydrogen gas for polycrystalline silicon, with a measurement range of 0.02 × 10-9 to 1 × 10-5 (v/v).
Electronic grade polycrystalline silicon is an important raw material for the semiconductor industry and integrated circuits, and technological advancements have put increasingly strict requirements on the quality of polycrystalline silicon products. In the production of polycrystalline silicon, there is a large excess of circulating hydrogen gas, and if trace phosphorus impurities are not removed, they will have a serious impact on the quality of polycrystalline silicon products. The phosphine content is extremely low in the production process of electronic grade polycrystalline silicon, and the problem of phosphorus impurities has become a bottleneck for the development of the electronic grade polycrystalline silicon industry.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed an SE30 concentration column combined with a DC550 packed column gas chromatography FPD detector to determine the phosphine content in hydrogen gas for polycrystalline silicon, and the results are satisfactory.