浩瀚HH-GJW多孔微球填充柱测多晶硅生产尾气中硅烷，岛津GC20142m*3mm

本标准规定了硅烷法生产多晶硅尾气中硅烷含量的气相色谱测定方法。
本标准适用于硅烷法生产多晶硅尾气中硅烷含量的测定。测定范围为0.050%～10.00%。

名称：填充柱
规格：2m*Φ3mm
型号：HH-GJW多孔微球
*高使用温度：240°C
适用于：安捷伦6890,7820,7890,8860,8890；赛默飞1310系列，岛津GC2014，PE，布鲁克，瓦里安，磐诺，福立，天瑞，天美，科创，东西电子，北分瑞利
标准：YS/T 1290-2018多晶硅生产尾气中硅烷含量的测定 气相色谱法
This standard specifies the gas chromatography method for determining the silane content in the tail gas of polycrystalline silicon produced by silane method.
This standard is applicable to the determination of silane content in the tail gas of polycrystalline silicon produced by silane method. The measurement range is 0.050% to 10.00%.
Name: Filler Column
Specification: 2m * Φ 3mm
Model: HH-GJW porous microspheres
*High operating temperature: 240 ° C
Applicable to: Agilent 689078207890886088890; Thermo Fisher 1310 series, Shimadzu GC2014, PE, Bruker, Varian, Panno, Fuli, Tianrui, Tianmei, Kechuang, Dongxi Electronics, Beifen Ruili
Standard: YS/T 1290-2018 Determination of Silane Content in Tail Gas of Polycrystalline Silicon Production Gas Chromatography Method