浩瀚GB/T 43772-2024电子气体 二氧化碳中总硫测定高分子聚合物填充柱HH-GFZ-IV

电子气体是指具有电子级纯度的特种气体，主要分为电子大宗气体及电子特气，广泛应用在包括集成电路、显示面板、半导体照明和光伏等泛半导体行业。电子气体广泛应用于半导体制造的诸多环节，包括清洗、离子注入、刻蚀、气相沉积、掺杂等工艺，因此被称为芯片制造的血液。电子特种气体的质量直接影响晶圆厂制造元器件的具体技术指标和良率，因此对气体纯度有着严格的要求。

高纯电子级二氧化碳在集成电路行业主要用于清洗技术和沉浸式光刻技术，二氧化碳的超临界特性在加工过程中能够对芯片的损坏降至*低，有着广泛的前景，未来高纯电子级二氧化碳的需求也将增大。


 

本文件规定了二氧化碳的技术要求、采样、试验方法、检验规则、标志、包装、运输、贮存及安全信息的要求。
本文件适用于由高纯二氧化碳经纯化制备的电子用二氧化碳。

名称：预分离柱

固定相：高分子聚合物（乙基苯乙烯和二乙烯苯的共聚物）

规格：4m*3mm（内径）

粒度：0.18mm-0.25mm

型号：HH-GFZ-IV

材质：不锈钢

应用：GB_T 43772-2024 电子气体 二氧化碳中总硫测定

适用于：安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE

浩瀚色谱（山东）应用技术开发有限公司，研制的《电子气二氧化碳中总硫测定预分离色谱柱》柱效高，预分离好，均不干扰总硫的测定，面积外标法定量，结果满意。


 

Electronic gas refers to special gases with electronic grade purity, mainly divided into electronic bulk gases and electronic specialty gases, widely used in the semiconductor industry including integrated circuits, display panels, semiconductor lighting, and photovoltaics. Electronic gases are widely used in various aspects of semiconductor manufacturing, including cleaning, ion implantation, etching, vapor deposition, doping, and other processes, and are therefore known as the lifeblood of chip manufacturing. The quality of electronic specialty gases directly affects the specific technical indicators and yield of components manufactured by wafer fabs, therefore there are strict requirements for gas purity.
High purity electronic grade carbon dioxide is mainly used in cleaning technology and immersive lithography technology in the integrated circuit industry. The supercritical characteristics of carbon dioxide can minimize chip damage during processing and have broad prospects. In the future, the demand for high-purity electronic grade carbon dioxide will also increase.
This document specifies the technical requirements, sampling, testing methods, inspection rules, labeling, packaging, transportation, storage, and safety information requirements for carbon dioxide.
This document applies to electronic carbon dioxide prepared by purifying high-purity carbon dioxide.
Name: Pre separation column
Fixed phase: Polymer (copolymer of ethylstyrene and divinylbenzene)
Specification: 4m * 3mm (inner diameter)
Particle size: 0.18mm-0.25mm
model: HH-GFZ-IV
Material: Stainless steel
Application: GB_T 43772-2024 Determination of Total Sulfur in Electronic Gas Carbon Dioxide
Applicable to: Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a "Pre separation Chromatographic Column for Total Sulfur Determination in Electronic Gas Carbon Dioxide" with high column efficiency, good pre separation, and no interference with the determination of total sulfur. The quantitative method is based on external standard method with satisfactory results.