haohan高纯四氯化硅中的微量三氯氢硅测定15%DC-550/101填充柱3m*1/8

在硅外延工艺中，三氯氢硅的纯度和质量直接影响外延层的质量和性能。因此，对硅外延用三氯氢硅进行严格的检测是确保硅片质量的关键。

浩瀚色谱（山东）应用技术开发有限公司,应用15%DC-550/101白色担体填充柱气相色谱法，建立了光纤原料四氯化硅中微量三氯氢硅的定量分析方法。该法具有安全，简便，灵敏和重复性好的特点。

名称：15%DC-550/101白色担体填充柱
规格：3m*1/8，60-80目

zui高使用温度：240°C

应用：工业三氯氢硅的测定

 

适用于：

安捷伦490在线/便携，4890,5890,6890,7820,7890,8860,8890

岛津GC-14C，GC-2010，GC-2014，GC-2030

赛默飞1310,1300,1610,1600

瓦里安3800系列

布鲁克PE580,590,680,690

磐诺A90，福立GC9790，华爱，天瑞，天美，GC7900，川仪，北分瑞利，东西电子，鲁南瑞虹，捷岛/科晓

 

In the silicon epitaxial process, the purity and quality of trichlorosilane directly affect the quality and performance of the epitaxial layer. Therefore, strict testing of trichlorosilane for silicon extension is the key to ensuring the quality of silicon wafers.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has established a quantitative analysis method for trace trichlorosilane in optical fiber raw material silicon tetrachloride using 15% DC-550/101 white support packed column gas chromatography. This method has the characteristics of safety, simplicity, sensitivity, and good repeatability.
Name: 15% DC-550/101 white support filling column
Specification: 3m * 1/8, 60-80 mesh
Maximum operating temperature: 240 ° C
Application: Determination of industrial trichlorosilane
Applicable to:
Agilent 490 online/portable, 48905890689088608890
Shimadzu GC-14C, GC-2010, GC-2014, GC-2030
Thermo Fisher Scientific 1310130016101600
Varian 3800 Series
Brooke PE580590680690
Panno A90, Fuli GC9790, Huaai, Tianrui, Tianmei, GC7900， Chuanyi, Beifen Ruili, Dongxi Electronics, Lunan Ruihong, Jiedao/Kexiao