气体中微量一氧化碳、甲烷、二氧化碳的测定,大多用灵敏度较高的氢焰离子化检测器(FiD)。随着半导体工业的发展,大规模集成电路的生产对高纯气体中一氧化碳、甲烷、二氧化碳的检测,提出了更高的要求。然而,对氢焰离子化检测器,随着灵敏度的提高,噪音明显增高,基线达到稳定需要较长的时间。
浩瀚色谱(山东)应用技术开发有限公司研发便携式甲烷转化炉,采用液氮冷阱冷却载气,基线不仅能很快达到稳定,而且在高灵敏度时,噪音显著降低。长期测定结果表明,这一方法是完全可行的,能够满足集成电路生产对高纯气体中微量一氧化碳、甲烷、二氧化碳检测的需要。
在安捷伦7890A气相色谱仪上安装调试,效率高,结果准确可靠,收到客户的欢迎。
For the determination of trace amounts of carbon monoxide, methane, and carbon dioxide in gases, most of the more sensitive hydrogen flame ionization detectors (FiD) are used. With the development of the semiconductor industry, the production of large-scale integrated circuits has put forward higher requirements for the detection of carbon monoxide, methane, and carbon dioxide in high-purity gases. However, for the hydrogen flame ionization detector, as the sensitivity increases, the noise increases significantly, and it takes a long time for the baseline to stabilize.
Haohan Chromatography (Shandong) Applied Technology Development Co., Ltd. develops a portable methane reformer, which uses a liquid nitrogen cold trap to cool the carrier gas. Not only can the baseline be quickly stabilized, but also at high sensitivity, the noise is significantly reduced. Long-term measurement results show that this method is completely feasible and can meet the needs of integrated circuit production for the detection of trace amounts of carbon monoxide, methane, and carbon dioxide in high-purity gases.
The installation and debugging on the Agilent 7890A gas chromatograph has high efficiency, accurate and reliable results, and is welcomed by customers.