气体中微量一氧化碳、甲烷、二氧化碳的测定,大多用灵敏度较高的氢焰离子化检测器(FiD)。随着半导体工业的发展,大规模集成电路的生产对高纯气体中一氧化碳、甲烷、二氧化碳的检测,提出了更高的要求。然而,对氢焰离子化检测器,随着灵敏度的提高,噪音明显增高,基线达到稳定需要较长的时间。
浩瀚色谱(山东)应用技术开发有限公司采用液氮冷阱冷却载气,基线不仅能很快达到稳定,而且在高灵敏度时,噪音显著降低。长期测定结果表明,这一方法是完全可行的,能够满足集成电路生产对高纯气体中微量一氧化碳、甲烷、二氧化碳检测的需要。
名称:填充柱
型号:TDX-01
规格:2m*3mm,60-80目
*高使用温度:240°C
编号:20211115006
适用于安捷伦7820A,7890,8860,8890
For the determination of trace carbon monoxide, methane and carbon dioxide in gas, hydrogen flame ionization detector (FiD) with high sensitivity is mostly used. With the development of semiconductor industry, the production of large-scale integrated circuits has put forward higher requirements for the detection of carbon monoxide, methane and carbon dioxide in high-purity gases. However, for hydrogen flame ionization detector, with the increase of sensitivity, the noise increases significantly, and it takes a long time for the baseline to reach stability.
Haohan Chromatographic (Shandong) Application Technology Development Co., Ltd. uses a liquid nitrogen cold trap to cool the carrier gas. The baseline can not only be stabilized quickly, but also reduce the noise significantly at high sensitivity. The long-term measurement results show that this method is completely feasible and can meet the requirements of IC production for the detection of trace carbon monoxide, methane and carbon dioxide in high-purity gases.
Name: Filled column
Model: TDX-01
Specification: 2m * 3mm, 60-80 meshes
Maximum operating temperature: 240 ° C
No.: 20211115006
Applicable to Agilent 7820A, 789088608890