haohan电子气体 二氧化碳中非甲烷总烃测定硅烷化玻璃球柱HH-BLWQ

电子气体是指具有电子级纯度的特种气体，主要分为电子大宗气体及电子特气，广泛应用在包括集成电路、显示面板、半导体照明和光伏等泛半导体行业。电子气体广泛应用于半导体制造的诸多环节，包括清洗、离子注入、刻蚀、气相沉积、掺杂等工艺，因此被称为芯片制造的血液。电子特种气体的质量直接影响晶圆厂制造元器件的具体技术指标和良率，因此对气体纯度有着严格的要求。
 

电子气体是半导体制造的关键，高纯电子级二氧化碳在集成电路中尤为重要。新国标《GB/T43772-2024》对二氧化碳纯度有严格要求。

本文件规定了二氧化碳的技术要求、采样、试验方法、检验规则、标志、包装、运输、贮存及安全信息的要求。
本文件适用于由高纯二氧化碳经纯化制备的电子用二氧化碳。

 

浩瀚色谱（山东）应用技术开发有限公司，研制的《电子气二氧化碳中总烃测定玻璃微球色谱柱 》柱效高，总烃峰型对称，不分叉，面积外标法定量，结果满意。

 

 

名称：分离柱

固定相：硅烷化玻璃微球

规格：3m*3mm（内径）

粒度：0.18mm-0.25mm

型号：HH-BLWQ

材质：不锈钢

应用：GB_T 43772-2024电子气体二氧化碳

适用于安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE，磐诺，北分瑞利，东西电子，天瑞，天美，科创

 
Electronic gas refers to special gases with electronic grade purity, mainly divided into electronic bulk gases and electronic specialty gases, widely used in the semiconductor industry including integrated circuits, display panels, semiconductor lighting, and photovoltaics. Electronic gases are widely used in various aspects of semiconductor manufacturing, including cleaning, ion implantation, etching, vapor deposition, doping, and other processes, and are therefore known as the lifeblood of chip manufacturing. The quality of electronic specialty gases directly affects the specific technical indicators and yield of components manufactured by wafer fabs, therefore there are strict requirements for gas purity.
Electronic gases are crucial for semiconductor manufacturing, and high-purity electronic grade carbon dioxide is particularly important in integrated circuits. The new national standard GB/T43772-2024 has strict requirements for the purity of carbon dioxide.
This document specifies the technical requirements, sampling, testing methods, inspection rules, labeling, packaging, transportation, storage, and safety information requirements for carbon dioxide.
This document applies to electronic carbon dioxide prepared by purifying high-purity carbon dioxide.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a glass microsphere chromatography column for the determination of total hydrocarbons in electronic gas carbon dioxide. The column has high column efficiency, symmetrical total hydrocarbon peak shapes, no branching, and can be quantified by area external standard method with satisfactory results.
Name: Separation Column
Fixed phase: Silanized glass microspheres
Specification: 3m * 3mm (inner diameter)
Particle size: 0.18mm-0.25mm
model: HH-BLWQ
Material: Stainless steel
Application: GB_T 43772-2024 Electronic Gas Carbon Dioxide
Suitable for Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE， Panno, Beifen Ruili, Dongxi Electronics, Tianrui, Tianmei, Sci Tech Innovation